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SC26
Wafer transport robots in 300mm wafer fabs.make 9 kHz fields that limit the performance of electron beam tools and are abarrier to achieving the next semiconductor CD node. The SC26 is a widebandwidth system that can cancel magnetic fields from DC to above 9 kHz. Toachieve its wide bandwidth, the SC26 uses low inductance field cancellingcables, installed in the electron beam tool enclosure.
The SC26 has inputs for two 200 kHz ACfield sensors (blue) that it can mix to optimise the electron beam toolperformance. These provide useful cancelling down to 10 Hz.Cancelling can beextended down to DC by adding a “Sensor SC24/DC+AC” and a sensor combiner foreach input channel used.
The SC26 cannot be used with larger cablesin a “room” installation like our SC24 system which operates at lowerfrequencies.
SC26 Features
- Makes the ambient magnetic field “OK” for electron beam tools in 300 mm wafer fabs
- Real time, wideband cancelling from DC to > 9 kHz fields
- Adapts to field amplitude and frequency changes within 10 μs
- Touch screen intelligent user interface with automatic setup and DC reset
- Simultaneous AC & DC field display with choice of Tesla or Gauss units
- Mixes dual sensors to create virtual sensor “inside” the EM column
- Built-in test field generator
- Ethernet and USB ports for remote operation and monitoring
SC26 Product Guide (pdf)
Brochure for the full SC26 system